With the continued need for shrinking pattern dimensions, semiconductor manufacturers continue to implement more complex patterning techniques, such as advanced multi-patterning, for the 10nm design ...

Process control charts are an important application of statistical process control (SPC) that are used in the management of processes in various industries with the aim of maintaining consistency, ...

Practical process control techniques including tuning single proportional integral derivative controllers, choosing appropriate control loops for a processing plant and measurement instrumentation. An ...

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...

The process control and instrumentation minor emphasizes developing skills and knowledge in theory, software and in the field. Students graduate ready to solve complex control problems in the chemical ...