With the continued need for shrinking pattern dimensions, semiconductor manufacturers continue to implement more complex patterning techniques, such as advanced multi-patterning, for the 10nm design ...

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...

In-process methods are key components of quality control in a chemical manufacturing plant. These methods ensure that a production reaction step conducted by trained operators within the entire ...

This publication serves as a high-level introduction to systems engineering for instrumentation and control at nuclear facilities. Systems engineering is a holistic, interdisciplinary and cooperative ...

SPC is a statistical tool that objectively identifies when it is worthwhile to perform a formal investigation of manufacturing variation, in order to identify and reduce its cause. SPC continually ...

The global digital economy creates a variety of internal and external factors that increase challenges in new product introduction (NPI). Products are becoming more complex, life cycles are getting ...